Berikut ini peserta yang lolos ke Babak Final di Lomba Tahfidz 5 Juz Online Nasional - Masjid Astra 2023.
| Stream Penilaian |
No. Peserta | Nama Peserta | Nilai Tajwid | Nilai Tartil & Husnul Adaa' | NIlai Hafalan | NILAI TOTAL | Asal Sekolah | Asal Provinsi |
| Stream A | A - 50 | SHABRA syatilla | 20.00 | 9.50 | 70.00 | 99.50 | PTQ Cahaya Hikmah | JAWA BARAT |
| Stream A | A - 5 | Dewa Azzam Ramawijaya | 19.00 | 10.00 | 70.00 | 99.00 | RTQ Qurma | DKI JAKARTA |
| Stream B | B - 35 | Ubay Abdurrahman | 19.00 | 10.00 | 70.00 | 99.00 | Shababa Islamic Homeschooling | JAWA BARAT |
| Stream B | C - 55 | Early Fania Resiya Respati | 19.50 | 9.00 | 69.75 | 98.25 | Rumah Tahfiz Aljazary | DKI JAKARTA |
| Stream C | E - 32 | Qonita Adzkia Hafizhah | 20.00 | 10.00 | 70.00 | 100.00 | SDIT Al Hanif Cilegon | BANTEN |
| Stream C | D - 33 | Moreno rafael muhammad | 20.00 | 10.00 | 70.00 | 100.00 | SMP IT Putra Abu Hurairah Mataram | NTB |
| Stream D | F - 10 | Annisa Syifa Najilah | 20.00 | 1.50 | 70.00 | 91.50 | Sekolah Islam Putri Al-Hanif | BANTEN |
| Stream D | F - 42 | Kayyisa Anandyta Irawan | 18.00 | 5.50 | 68.00 | 91.50 | Ma'Had Al Qur'an Wal Lughah Akhwat | JAWA BARAT |
| Stream D | F - 13 | Latifah Syakira | 20.00 | 10.00 | 70.00 | 100.00 | SMP IT Dar El Iman | SUMATRA BARAT |
| Stream D | F - 20 | Muhammad Mahdavikia Alkautsar | 20.00 | 10.00 | 70.00 | 100.00 | PKBM Islam Baitul Qur'an | JAWA TENGAH |
| Stream E | H - 34 | Muhammad Daud Taqwa | 20.00 | 10.00 | 70.00 | 100.00 | Ma'Had Sulthon Al-Islamy | JAWA BARAT |
| Stream E | G - 1 | Salsabilah | 20.00 | 10.00 | 69.75 | 99.75 | STQ Al Qudwah | JAWA TIMUR |
| Stream E | H - 13 | Auliya Sri Wulandari Gultom | 20.00 | 10.00 | 69.75 | 99.75 | SDN Simangumban 173242 | SUMATRA UTARA |